MEMS reflectarray antenna for satellite applications

A method for manufacturing a module for a reflectarray antenna, the method comprising:

• disposing a radiating element over a first surface of a first dielectric layer;
• forming a metallized ground plane over a second surface of the first dielectric layer;
• disposing a phase-shifter element over the metallized ground plane;
• forming a radio-frequency (“rf”) interface adapted to couple energy between the phase-shifter element and the radiating element and to provide an rf interface with the module substantially only through the radiating element;
• forming a direct-current (“dc”) interface adapted to couple energy between the phase-shifter element and an exterior to the module;
• and
• sealing the phase-shifter element within an interior of the module.