Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece
AssigneeMicron Technology, Inc.
InventorSuresh Ramarajan
Life of this patent
Estimating the term…
Abstract
Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to the rotating microfeature workpiece are disclosed herein. The characteristic can depend on the relative motion between the magnetic field and the conductive material of the microfeature workpiece. The characteristic can include the strength of the magnetic field, current in an electromagnet circuit used to create the magnetic field, force exerted on the magnetic field source, or movement of the magnetic field source. The apparatus can include a feedback control device to adjust the rotation speed of the microfeature workpiece based on the characteristic detected.
Claims51
A method for detecting a rotational state of a microfeature workpiece having an electrically conductive material, comprising:
- supporting the microfeature workpiece;
- rotating the microfeature workpiece;
- establishing a magnetic field at least proximate to the microfeature workpiece so that an eddy current is produced in a portion of the microfeature workpiece when the workpiece is rotated;
- and
- detecting a change of a rotation speed of the microfeature workpiece by detecting a characteristic corresponding to a state of the magnetic field, the characteristic depending at least in part on relative motion, or lack of relative motion, between the conductive material of the microfeature workpiece and the magnetic field.
A method for detecting a rotational state of a microfeature workpiece, comprising:
- supporting the microfeature workpiece with a workpiece support, the microfeature workpiece including an electrically conductive material;
- rotating the microfeature workpiece while the microfeature workpiece is carried by the workpiece support;
- establishing a magnetic field at least proximate to the microfeature workpiece so that an eddy current is produced in a portion of the microfeature workpiece when the workpiece is rotated;
- and
- detecting a change in a rotation speed of the microfeature workpiece by detecting a change in the magnetic field caused by relative motion, or lack of relative motion, between the conductive material of the microfeature workpiece and the magnetic field.
A method for detecting a rotational state of a microfeature workpiece having an electrically conductive material, comprising:
- supporting the microfeature workpiece with a workpiece support;
- rotating the workpiece support to rotate the microfeature workpiece;
- removing material from at least one face of the microfeature workpiece with at least one rotating brush;
- establishing a magnetic field at least proximate to the microfeature workpiece by applying an electrical potential to an electromagnet circuit so that the magnetic field produces an eddy current in a portion of the microfeature workpiece when the workpiece is rotated;
- and
- detecting a change in a rotation speed of the microfeature workpiece by detecting a change in a characteristic of the electromagnet circuit caused by relative motion, or lack of relative motion, between the conductive material of the microfeature workpiece and the magnetic field.
An apparatus for detecting a rotational state of a microfeature workpiece having an electrically conductive material, the apparatus comprising:
- a support having an engaging surface configured to contact and rotate a microfeature workpiece;
- a magnetic field source positioned at least proximate to the support, the magnetic field source being configured to produce a magnetic field at least proximate to the support so that an eddy current is produced in a portion of the microfeature workpiece when the workpiece is rotated;
- and
- a detection device positioned at least proximate to the support, the detection device being configured to detect a characteristic corresponding to a state of the magnetic field, the characteristic depending at least in part on relative motion, or lack of relative motion, between the conductive material of the microfeature workpiece and the magnetic field.
An apparatus for detecting a rotational state of a microfeature workpiece having an electrically conductive material, the apparatus comprising:
- a support having an engaging surface configured to carry and rotate a microfeature workpiece;
- at least one rotating brush positioned to engage at least one face of the microfeature workpiece, the at least one brush being positioned to remove material from the at least one face of the microfeature workpiece;
- a magnetic field source positioned at least proximate to the support, the magnetic field source being configured to produce a magnetic field at least proximate to the support so that the magnetic field produces an eddy current in a portion of the microfeature workpiece when the workpiece is rotated;
- and
- a detection device positioned at least proximate to the support, the detection device being configured to detect a characteristic corresponding to a state of the magnetic field, the characteristic depending at least in part on relative motion, or lack of relative motion, between the conductive material of the microfeature workpiece and the magnetic field.
An apparatus for detecting a rotational state of a microfeature workpiece having an electrically conductive material, the apparatus comprising:
- support means for supporting and rotating a microfeature workpiece,
- magnetic field means for producing a magnetic field at least proximate to the support so that an eddy current is produced in a portion of the microfeature workpiece when the workpiece is rotated;
- and
- detection means for detecting a characteristic corresponding to a state of the magnetic field, the characteristic depending at least in part on relative motion, or lack of relative motion, between the conductive material of the microfeature workpiece and the magnetic field.
Dependencies are inferred from the claim text.