Movable MEMS-based noncontacting device
AssigneeNetwork Photonics, Inc.
InventorsBevan Staple, Richard Roth
Life of this patent
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Abstract
A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.
Claims18
A movable microstructure comprising:
- a first tiltable assembly formed over a substrate;
- a second tiltable assembly formed over the substrate;
- and
- first and second electrodes respectively positioned relative to the substrate to tilt the first and second tiltable assemblies upon activation such that the first and second tiltable assemblies become interdigitated and substantially coplanar.
A method for fabricating a movable microstructure, the method comprising:
- forming a first tiltable assembly over a substrate;
- forming a second tiltable assembly over the substrate;
- and
- forming first and second electrodes relative to the substrate to tilt the first and second tiltable assemblies upon activation such that the first and second tiltable assemblies become interdigitated and substantially coplanar.
A movable microstructure, the microstructure comprising:
- first tiltable means formed over a support means;
- second tiltable means formed over the support means;
- and
- means for generating electrostatic forces for tilting the first tiltable means and the second tiltable means into an interdigitated and substantially coplanar configuration.
Dependencies are inferred from the claim text.