Micromachined ultrasonic transducer cells having compliant support structure
AssigneeGeneral Electric Company
InventorsLowell Scott Smith, Douglas G. Wildes
Life of this patent
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Abstract
A micromachined ultrasonic transducer array comprising a multiplicity of cMUT cells built on a substrate. Each cMUT cell comprises a compliant support structure built on the substrate, a membrane supported over a cavity by the compliant support structure, a first electrode supported by the membrane, and a second electrode that forms a capacitor with the first electrode, the cavity being disposed between the first and second electrodes. The compliant support structure uncouples the non-membrane outer surface of each cMUT cell from the supporting substrate.
Claims15
A device comprising a mechanical structure micromachined in or on a substrate, said mechanical structure comprising a compliant support structure, and a member supported by said compliant support structure, wherein said compliant support structure changes size or shape during movement of said member, wherein said member comprises a membrane and a first electrode supported by said membrane, and further comprising a second electrode disposed at a distance from said first electrode to form a capacitor with a cavity disposed therebetween, wherein said compliant support structure changes size or shape during compression/expansion of said membrane, and wherein said compliant support structure comprises a first wall, a ring-like structure having an inner peripheral portion and an outer peripheral portion, one of said inner and outer peripheral portions being built on said first wall, and a second wall built on the other of said inner and outer peripheral portions and connected to said membrane.
A cMUT cell comprising a substrate, a plurality of compliant support structures, a membrane supported over a cavity by said compliant support structures, a first electrode supported by said membrane, and a second electrode that forms a capacitor with said first electrode, said cavity being disposed between said first and second electrodes, wherein each of said compliant support structures change size or shape during compression/expansion of said membrane, wherein said member comprises a membrane and a first electrode supported by said membrane, and further comprising a second electrode disposed at a distance from said first electrode to form a capacitor with a cavity disposed therebetween, wherein said compliant support structure changes size or shape during compression/expansion of said membrane, and wherein said compliant support structure comprises a first wall, a ring-like structure having an inner peripheral portion and an outer peripheral portion, one of said inner and outer peripheral portions being built on said first wall, and a second wall built on the other of said inner and outer peripheral portions and connected to said membrane.
A device comprising a mechanical structure micromachined in or on a substrate, said mechanical structure comprising a compliant support structure, and a member supported by said compliant support structure, wherein said compliant support structure changes size or shape during movement of said member, wherein said member comprises a membrane and a first electrode supported by said membrane, and further comprising a second electrode disposed at a distance from said first electrode to form a capacitor with a cavity disposed therebetween, wherein said compliant support structure changes size or shape during compression/expansion of said membrane, and wherein said compliant support structure comprises:
- a first wall;
- a first ring-like structure having an inner peripheral portion and an outer peripheral portion, one of said inner and outer peripheral portions of said first ring-like structure being built on said first wall;
- a second wall built on the other of said inner and outer peripheral portions of said first ring-like structure;
- a second ring-like structure overlying said first ring-like structure and having an inner peripheral portion and an outer peripheral portion, one of said inner and outer peripheral portions of said second ring-like structure being built on said second wall;
- and
- a third wall built on the other of said inner and outer peripheral portions of said second ring-like structure and connected to said membrane.
A cMUT cell comprising a substrate, a plurality of compliant support structures, a membrane supported over a cavity by said compliant support structures, a first electrode supported by said membrane, and a second electrode that forms a capacitor with said first electrode, said cavity being disposed between said first and second electrodes, wherein each of said compliant support structures change size or shape during compression/expansion of said membrane, wherein said member comprises a membrane and a first electrode supported by said membrane, and further comprising a second electrode disposed at a distance from said first electrode to form a capacitor with a cavity disposed therebetween, wherein said compliant support structure changes size or shape during compression/expansion of said membrane, and wherein said compliant support structure comprises:
- a first wall;
- a first ring-like structure having an inner peripheral portion and an outer peripheral portion, one of said inner and outer peripheral portions of said first ring-like structure being built on said first wall;
- a second wall built on the other of said inner and outer peripheral portions of said first ring-like structure;
- a second ring-like structure overlying said first ring-like structure and having an inner peripheral portion and an outer peripheral portion, one of said inner and outer peripheral portions of said second ring-like structure being built on said second wall;
- and
- a third wall built on the other of said inner and outer peripheral portions of said second ring-like structure and connected to said membrane.
Dependencies are inferred from the claim text.