Integrated electromagnetic shielding device
AssigneeKoninklijke Philips Electronics N.V.
InventorsPatrice Gamand, Alain De La Torre
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Abstract
To isolate at least one electric or electronic element (16, 58), for example an interconnection integrated onto a semiconductor substrate (12), this device comprises at least one isolation means chosen from an isolating layer (84, 86, 90) extending in the substrate and an assembly whose height exceeds that of the element and which comprises, on either side of the element, at least two superposed conductors (60 62 64, 66 68 70), which are integrated into the substrate and extend along the element.
Claims5
A device for isolating at least one electric or electronic element integrated onto a semiconductor substrate, comprising:
- at least one electrically insulating or semiconducting isolating layer which extends in the substrate and is laterally spaced from said element;
- an assembly, which is disposed over the substrate, said assembly including, on either side of the element, at least two superposed electric conductors, which extend along the element, wherein the assembly has a height that exceeds a height of the element;
- and
- at least one transverse trench which extends at least partly directly beneath said element and is filled with an electrically insulating material.
Dependencies are inferred from the claim text.