Modular substrate measurement system
AssigneesNanophotonics AG, Recif, S.A.
InventorsMichael Abraham, Ivo J M M Raaijmakers, Alain Gaudon, Pierre Astegno
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Abstract
A substrate measurement system including a measurement chamber and a substrate handling chamber possessing a substrate transfer and a substrate container interface arranged to receive a substrate to container. The handling chamber contains a first interface to connect the measurement chamber and the measurement chamber contains a second interface to connect the handling chamber. The transfer means is arranged to transfer substrates between the container and the measurement chamber through the handling chamber, in which system a second measurement chamber is provided, having the same second interface as the first measurement chamber to replace latter chamber.
Claims11
An assembly of a substrate measurement system comprising a first measurement chamber, and a substrate handling chamber provided with a substrate transfer and at least one substrate container interface for receiving a substrate container, said substrate handling chamber being provided with a first mechanical interface to connect to the first measurement chamber, said first measurement chamber comprising a measurement instrument and being provided with a second mechanical interface to connect to said substrate handling chamber, and said substrate transfer being arranged to transfer substrates between said substrate container and said first measurement chamber through said substrate handling chamber, characterised in that a second measurement chamber is provided, which fits within the same dimensions as said first measurement chamber and is provided with the same identical second mechanical interface as said first measurement chamber to replace said first measurement chamber, and wherein said substrate container interfaces, and said first mechanical interface of the substrate handling chamber are identical so that each of said interfaces can connect at choice either to the interface of a substrate container or to the second mechanical interface of a measurement chamber.
The assembly of a substrate measurement system in accordance with claim. 1, wherein said second measurement chamber is one of a set of measurement chambers.
Dependencies are inferred from the claim text.