Ion source with electrode kept at potential(s) other than ground by zener diode(s), thyristor(s) and/or the like

An ion source comprising:

• an anode and a cathode;
• a power supply in electrical communication with the anode and/or cathode of the ion source;
• at least one diode and/or thyristor in electrical communication with the cathode for maintaining the cathode of the ion source at a potential(s) other than ground during at least some part of ion source operation.

An ion source comprising:

• an anode, a cathode and a conductive wall(s) at least partially surrounding a deposition chamber;
• a power supply in electrical communication with the anode and/or cathode of the ion source;
• at least one circuit for maintaining the cathode of the ion source at a potential(s) other than ground.

A method of operating an ion source, the method comprising:

• providing an ion source including an anode, a cathode and a conductive wall(s), the wall(s) at least partially surrounding a deposition chamber, and wherein a power supply is in electrical communication with the anode and/or cathode of the ion source;
• and
• maintaining the cathode of the ion source at a potential(s) other than ground for at least a period of time during ion source operation.