Method of assembling elements by localized heating
AssigneeCommissariat a l'Energie Atomique
InventorHenri Blanc
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Abstract
The invention relates to a process of assembly of at least two silicon substrates. The method comprises: a step of placing in contact a first silicon substrate (9) with a second silicon substrate (10), the first and second substrates (9, 10) being substantially non-transparent for a wavelength λ of laser radiation (R), and a step of illuminating the first silicon substrate (9) with a laser beam of wavelength λ to create a fusion path (21), along the laser beam axis (A1-A2), in the thickness of the first substrate (9) and in all or part of the thickness of the second substrate (10). The invention is applied to the sealing of cavities and of mechanical or electrical joints situated at the interface of two silicon substrates.
Claims7
Method of assembly of at least two silicon substrates, comprising:
- a step of placing in contact at least one substantially planar face of a first silicon substrate with a substantially planar face of a second silicon substrate so as to constitute an interface between the first and second substrates, the first and second substrates being substantially non-transparent for a wavelength λ of laser radiation, and
- a step of illuminating the first silicon substrate with a laser beam of wavelength λ to create a fusion path, along the laser beam axis, in the thickness of the first substrate and in all or part of the thickness of the second substrate,
- wherein the creation of the fusion path is accompanied by a reduction of mechanical strength of the silicon at the interface between the fusion path and the remainder of the silicon substrate and, on either side of the fusion path, over a finite distance, a direct sealing of the interface between the two silicon substrates.
Dependencies are inferred from the claim text.