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US 7,029,962 B2Granted
Methods for forming a high performance capacitor
AssigneeIntel Corporation
InventorLarry Eugene Mosley
Life of this patent
Estimating the term…
Abstract
Embodiments of methods of forming capacitors are generally described herein. Other embodiments may be described and claimed.
Claims9
A method comprising:
- forming a capacitor having at least four conductive layers embedded in a dielectric, wherein the at least four conductive layers includes a first plurality of conductive layers interlaced with a second plurality of conductive layers;
- and
- forming a plurality of vias coupling the at least four conductive layers to a plurality of controlled collapse chip connection sites on at least two surfaces of the capacitor, wherein the plurality of vias includes a first set of vias and a second set of vias, and the first set of vias couples the first plurality of conductive layers to a first plurality of controlled collapse chip connection sites on the at least two surfaces of the capacitor, and the first set of vias extends through openings in and is electrically isolated from the second plurality of conductive layers, and the second set of vias couples the second plurality of conductive layers to a second plurality of controlled collapse chip connection sites on the at least two surfaces, and the second set of vias extends through openings in and is electrically isolated from the first plurality of conductive layers, and wherein the plurality of vias are plated through holes.
A method comprising:
- forming a capacitor having at least four conductive layers embedded in a dielectric, wherein the at least four conductive layers includes a first plurality of conductive layers interlaced with a second plurality of conductive layers;
- forming a pair of substantially rigid outer surfaces from a material that includes barium titanate;
- and
- forming a plurality of vias coupling the at least four conductive layers to a plurality of connection sites on at least two surfaces of the capacitor, wherein the plurality of vias includes a first set of vias and a second set of vias, and the first set of vias couples the first plurality of conductive layers to a first plurality of connection sites on the at least two surfaces of the capacitor, and the first set of vias extends through openings in and is electrically isolated from the second plurality of conductive layers, and the second set of vias couples the second plurality of conductive layers to a second plurality of connection sites on the at least two surfaces, and the second set of vias extends through openings in and is electrically isolated from the first plurality of conductive layers, and wherein the plurality of vias are plated through holes, and wherein the plurality of connection sites includes a plurality of pads located on the pair of substantially rigid outer surfaces, wherein at least two of the plurality of pads are to couple to a substrate using a solder bump, wherein the number of pads are coupled to the at least four conductive layers through the plurality of vias, and wherein the number of conductive layers is greater than about 50.
1 more element
Dependencies are inferred from the claim text.