Cooling system for a semiconductor device and method of fabricating same

A method of forming an active cooling apparatus on a semiconductor substrate, comprising:

• coating the backside of a first semiconductor substrate with a mask layer;
• patterning the mask layer;
• etching a first continuous trench into the backside of the first semiconductor substrate;
• forming at least one opening in the first continuous trench for allowing coolant supplied from the active cooling apparatus to exit or enter the first continuous trench;
• and
• positioning the active cooling apparatus on the backside of the first semiconductor substrate.

A method of forming cooling elements in a semiconductor substrate, comprising:

• etching the semiconductor substrate from a backside of the semiconductor substrate to form a plurality of trenches;
• depositing thermally conductive material in the plurality of trenches;
• forming a diffusion layer in the semiconductor substrate;
• and
• doping the diffusion layer with a dopant having a polarity opposite a polarity of the semiconductor substrate.

A method of forming an active cooling apparatus on a semiconductor substrate, comprising:

• coating the backside of a semiconductor substrate with a mask layer;
• patterning the mask layer;
• etching a continuous trench into the backside of the semiconductor substrate;
• forming two openings in the continuous trench for respectively allowing coolant supplied from the active cooling apparatus to exit and enter the continuous trench;
• and
• positioning the active cooling apparatus on the backside of the semiconductor substrate.

A method of forming an active cooling apparatus on a semiconductor substrate, comprising:

• etching a continuous trench having a plurality of channels into the backside of the semiconductor substrate;
• forming an opening in the continuous trench, wherein coolant supplied from the active cooling apparatus passes through the opening;
• and
• positioning the active cooling apparatus on the backside of the semiconductor substrate.