Method for manufacturing surface acoustic wave device and inspecting instrument

Abstract

In a tester for a surface acoustic wave device used as a filter for high frequency bands in the field of mobile communications, the tester includes: an electron gun generating an electron beam to be first electrons; a condenser lens for converging the electron beam on a substrate; an electron beam scanning portion for scanning the electron beam on the substrate; a secondary electron detector detecting second electrons generating from the substrate by irradiated first electrons; a substrate holder holding the substrate; and a conductive grounding tool which can contact the metal film. The grounding tool includes a contacting head. The grounding tool includes: a contacting head that can contact the grounding tool and the metal film; an arm portion arranged at the end of the contacting head; a shaft arranged at the other end of the contacting head, and rotating the arm portion. The substrate has a two-layer structure, which includes: a circular piezo-electric substrate including lithium tantalate (LiTaO3); and a metal film including aluminum (Al) formed on the piezo-electric substrate.

Dependencies are inferred from the claim text.