Tertiary alcohol compounds having alicyclic structure
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsKoji Hasegawa, Takeru Watanabe, Takeshi Kinsho
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Abstract
Tertiary alcohol compounds of formula (1) are novel wherein R1 and R2 are C1–10 alkyl groups which may have halogen substituents, or R1 and R2 may form an aliphatic hydrocarbon ring, Y and Z are a single bond or a divalent C1–10 organic group, and k=0 or 1. Using the tertiary alcohol compounds as a monomer, polymers are obtained. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation and has excellent sensitivity, resolution, etching resistance and substrate adhesion
Claims20
A polymer containing a monomeric component from a compound of formula 1 as a monomer
- wherein R1 and R2 are independently a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms in which some or all of the hydrogen atoms on constituent carbon atoms are optionally substituted with halogen atoms, or R1 and R2, taken together, may form an aliphatic hydrocarbon ring, Y and Z are independently a single bond or a straight, branched or cyclic divalent organic group made up of 1 to 10 carbon atoms, and k is 0 or 1, with the proviso that the compound of formula (1) is not
A polymer containing a monomeric component from a compound of formula 2 as a monomer
- wherein R3 and R4 are independently a straight, branched or cyclic alkyl group of 1 to 6 carbon atoms,
- with the proviso that R3 and R4 are not both methyl.
A polymer containing a monomeric component from a compound of formula 1 as a monomer
- wherein R1 and R2 are independently a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms in which some or all of the hydrogen atoms on constituent carbon atoms are optionally substituted with halogen atoms, or R1 and R2, taken together, may form an aliphatic hydrocarbon ring, Y is a straight, branched or cyclic divalent organic group made up of 1 to 10 carbon atoms, Z is a single bond or a straight, branched or cyclic divalent organic group of 1 to 10 carbon atoms, and k is 0 or 1.
Dependencies are inferred from the claim text.