Single wafer type substrate cleaning method and apparatus
AssigneeSes S.A.
InventorsYuji Ono, Ryoichi Ohkura
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Abstract
In the drying step of the single wafer type substrate cleaning system for cleaning wafers not stored in a cassette, in a sealed cleaning housing, a spin drying treatment is applied to the wafer when the wafer is supported and rotated at high speed while an inert gas for preventing oxidation is supplied to the face of the wafer, and the amount of the inert gas to be supplied to the face of the wafer is larger at the outer peripheral portion of the wafer than that supplied at the center thereof, thereby preventing oxidation on the face of the wafer effectively while optimizing the benefits of the single wafer type cleaning system.
Claims3
A spin-drying method of wet-cleaned wafers which are not stored in a cassette, individually, in a sealed cleaning housing, said method consisting of the application of a spin drying treatment to the face of each wafer by supporting and rotating each wafer at high speed in the sealed cleaning housing while an inert gas for preventing oxidation is supplied to the face of the wafer in a drying step,
- where the inert gas is supplied to the inside of a gas injection section having a bottomplate and flows along the upper face of a baffle plate, turns around the outer peripheral edge of the baffle plate, and passes through injection openings of the bottom plate, said injection openings being located between the baffle plate and the wafer,
- where the amount of inert gas to be supplied to the face of each wafer is such that the amount of inert gas supplied at the outer peripheral portion is larger than that at the center thereof.
Dependencies are inferred from the claim text.