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AssigneeJapan Science and Technology Corporation
InventorsHideomi Koinuma, Yuji Matsumoto, Takatomo Sasaki, Yusuke Mori, Masashi Yoshimura
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There are provided a method of superflattening an oxide crystal that is soluble neither with acid nor with alkaline, a method of making a ReCa4O(BO3)3 family oxide single crystal thin film using the superflattening method, a ReCa4O(BO3)3 family oxide single crystal thin film having a SHG property, a superflattening method for light incident/emitting surfaces, and a defect assessing method for oxide crystals. The surface of an oxide crystal that is soluble neither with acid nor with alkaline is reduced with a reducing agent, the reduced oxide crystal surface is dissolved with an aqueous solution of acid or alkaline, the surface dissolved oxide crystal is heat-treated in the atmosphere, whereby the surface of an oxide crystal that is soluble neither with acid nor with alkaline is superflattened to an atomic level. According to this method, a chemically stable oxide which because of its complexity in both composition and structure is soluble neither with acid nor with alkaline and is insoluble even with a fluoric acid is allowed by reduction to be converted into a simpler oxide conventionally soluble with hydrochloric, nitric or sulfuric acid; hence a surface of its crystal is rendered capable of dissolving. Then, heat-treating the dissolved surface in the atmosphere at a suitable temperature for a suitable time period allows surface atoms to be rearranged and the surface to be superflattened to an atomic level. The present invention is applicable to the technical fields that require ultraviolet laser light, especially as core technologies of optical devices applied to optical information processing, optical communication or the like.
A method of superflattening a surface of an oxide crystal that is soluble neither with an acid nor with alkaline, characterized in that it comprises the steps of:
A method of making a ReCa4O(BO3)3 system oxide single crystal thin film, characterized in that it comprises the steps of:
An oxide single crystal thin film, characterized in that it comprises a substrate of a first oxide single crystal which is soluble neither with acid nor with alkali but a surface of which is superflattened by reducing such an insoluble surface of the first oxide single crystal with a reducing agent, dissolving the reduced surface of the first oxide single crystal with an aqueous acid or alkaline solution and heat-treating in the atmosphere the first oxide single crystal with its reduced surface dissolved;
A method of flattening a light incident/emitting surface, characterized in that the surface is of an oxide optical crystal soluble neither with acid nor with alkaline and the method comprises the steps of:
A crystal defect assessment method, characterized in that it comprises the steps of:
Dependencies are inferred from the claim text.