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US 7,029,507 B2Granted
Polishing using multi-metal oxide nanopowders
AssigneeNanoProducts Corporation
InventorsTapesh Yadav, Karl Pfaffenbach
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Abstract
Polishing powders of nanoscale dimensions are disclosed. Complex, multi-metal oxides are disclosed as constituents for chemical mechanical planarization, (CMP) as well as polishes for optical components, photonic devices, and other applications.
Claims15
A process of producing a polishing slurry comprising:
- providing a feed composition wherein the feed composition comprises a blend of a first fluid precursor and a second fluid precursor, wherein the first fluid precursor comprises of the first metal and the second fluid precursor comprises of the second metal;
- introducing the feed composition into a reactor wherein the feed composition is converted into a vapor at a temperature greater than 3000 C;
- transforming the vapor into polishing powder;
- and
- dispersing the polishing powder in a solvent to form the polishing slurry.
2 more elements
A method for producing a polishing slurry comprising:
- preparing nanoparticles with a composition comprising at least two metals selected from the group comprising:
- aluminum, silicon, copper, cerium, zirconium, rare earth, alkaline earth, tungsten, titanium, iron, nickel, cobalt, zinc, tin, boron, platinum, palladium, silver, gold, hafnium, and manganese, wherein the preparing comprises introducing the composition into a reactor wherein the composition is converted into a vapor at a temperature greater than 3000 C and transforming the vapor into the nanoparticles;
- wherein the hardness of the nanoparticles with a composition comprising at least two metals is different than the hardness of single metal oxides of alumina and silica;
- dispersing the nanoparticles in water or organic solvent;
- and
- adding additional additives thereby preparing a polishing slurry.
3 more elements
Dependencies are inferred from the claim text.