US 7,029,376 B1 · Process of fabricating write pole in magnetic recording head using rhodium CMP stop layer

Abstract

In the formation of the top magnetic write pole in a thin film magnetic recording head, a CMP stop layer comprising rhodium is deposited over the Al2O3 layer that overlies the top magnetic pole. A mixture of silicon dioxide, ammonium persulfate and benzotriazole is employed as a slurry in the CMP process that removes the portion of the Al2O3 layer covering the top magnetic pole. This eliminates the need for an extra thick layer of Al2O3 to be first deposited over the top pole and then removed to expose the top pole. The magnetic layer that forms the top pole can be plated to the target thickness of the top pole. As a result, the thickness of the photoresist layer that is used to define the size and shape of the top pole can be decreased to a desirable thickness, facilitating the use of DUV radiation to expose the photoresist layer.

Claims21

Dependent claims

A process of fabricating a pole in a magnetic read-write head comprising:

forming a first layer of a non-magnetic material;
forming a mask layer over the first layer;
forming a trench in the mask layer;
forming a second layer of a magnetic material over the first layer in the trench;
removing the mask layer, leaving the second layer in place;
forming a third layer of a non-magnetic material over the first and second layers;
forming a CMP stop layer over the third layer, the CMP stop layer comprising Rh;
and
performing a CMP process to remove a portion of the third layer thereby exposing a surface of the second layer.

6 more elements

Dependencies are inferred from the claim text.

Process of fabricating write pole in magnetic recording head using rhodium CMP stop layer

Life of this patent

Process of fabricating write pole in magnetic recording head using rhodium CMP stop layer

Life of this patent

Abstract

Claims21