Pump controller for precision pumping apparatus
AssigneeMykrolis Corporation
InventorsRaymond A. Zagars, Robert F. McLoughlin
Life of this patent
Estimating the term…
Abstract
A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparatus are adjusted to avoid these problems.
Claims19
A process for controlling a multistage pump to dispense a fluid, the multistage pump having a feed chamber, a dispensation chamber, and an outlet valve of the multistage pump coupled to the dispensation chamber, the process comprising:
- a first stage, wherein while a first valve between the feed chamber and the dispensation chamber is closed and the outlet valve is closed, the dispensation chamber is brought to an equilibrium pressure state;
- and
- a second stage, wherein a dispensation pump disposed in the dispensation chamber is activated to dispense the fluid through the outlet valve and onto an object upon opening the outlet valve and activating the dispensation pump.
A process for controlling a multistage pump to dispense a fluid, the multistage pump having a feed chamber, a dispensation chamber, and an outlet valve of the multistage pump coupled to the dispensation chamber, the process comprising a first stage, wherein after the outlet valve is opened, a dispensation pump disposed in the dispensation chamber is activated to dispense the fluid through the outlet valve and onto an object.
Dependencies are inferred from the claim text.