Seal member, and substrate storage container using the same
AssigneesShin-Etsu Polymer Co., Ltd., Shin-Etsu Handotai Co., Ltd.
InventorsToshitsugu Yajima, Toshiyuki Kamada
Life of this patent
Estimating the term…
Abstract
A seal member for a substrate storage container disposed between an opening end portion of a container body and a cover, which container body and cover form the container and which container body has the opening end portion and stores substrates, is disclosed. The seal member comprises a base body section formed of a first material and a covering section formed of a second material and covering at least a part of the base body section, wherein the covering section includes a seal forming portion for forming a seal in contact with one of the container body and the cover.
Claims6
A seal member to be interposed between an opening end portion of a substrate storage container and a cover, said container comprising a container body which includes said opening end portion on a front side thereof and which stores a substrate and said cover, said cover being provided with a fitting groove formed on an inner surface thereof;
- said seal member comprising a base body section formed of a rigid thermoplastic resin material and a covering section formed of a flexible thermoplastic elastomer material;
- said base body section including an engaging protrusion adapted to be fitted in said fitting groove of said cover;
- said covering section being fixed to an inner periphery side surface of said base body section to cover said engaging protrusion of said base body section;
- and
- said covering section including a seal forming portion adapted to contact said opening end portion of said container body to form a seal, said seal forming portion being formed to become gradually thinner toward a tip end thereof and to extend obliquely.
A substrate storage container comprising a container body which includes an opening end portion on a front side thereof and stores a substrate, a cover, and a seal member interposed between said opening end portion and said cover,
- said cover being provided with a fitting groove formed on an inner surface thereof;
- said seal member comprising a base body section which is formed of a first rigid thermoplastic resin material and a covering section which is formed of a flexible thermoplastic elastomer material;
- said base body section including an engaging protrusion adapted to be fitted in said fitting groove of said cover;
- said covering section being fixed to an inner periphery side surface of said base body section to cover said engaging protrusion of said base body section;
- and
- said covering section including a seal forming portion which comes in contact with said opening end portion of said container body to form a seal, said seal forming portion being formed to become gradually thinner toward a tip end thereof and to extend obliquely.
Dependencies are inferred from the claim text.