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US 7,028,550 B2Granted
Implantable pressure sensors
AssigneeProteus Biomedical, Inc.
InventorsMark Zdeblick, Benedict James Costello
Life of this patent
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Abstract
Implantable pressure sensors and methods for making and using the same. A feature of at least some of the subject pressure sensors is that they are low-drift sensors. Additional features of representative pressure sensors include the presence of at least one strain transducer that is fabricated from a stable gauge material. The subject pressure sensors find use in a variety of applications.
Claims53
An implantable pressure sensor structure comprising:
- a substrate formed with an opening;
- a compliant member mounted on said substrate and spanning said opening in a manner such that said compliant member has first and second opposing exposed surfaces;
- and
- at least first and second strain transducers positioned on the same surface or opposing surfaces of said compliant member so that their outputs respond oppositely to deflection of said compliant member resulting from differential pressure across said complaint member but respond similarly to deformation of said substrate;
- wherein said first and second strain transducers comprise piezoresistors fabricated from a stable gauge material and covered by a passivating layer;
- and
- wherein said pressure sensor structure is a low-drift pressure sensor structure.
4 more elements
Dependencies are inferred from the claim text.