Method and apparatus for supporting a substrate
AssigneeSpeedline Technologies, Inc.
InventorsGerald Pham-Van-Diep, John E. Morini
Life of this patent
Estimating the term…
Abstract
An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface includes a frame, a transportation system that moves the substrate through the apparatus, a substrate support system, coupled to the frame, having a non-rigid portion that contacts and supports the substrate during an operation on the substrate, wherein the non-rigid portion allows flexure of the substrate before and during the performance of an operation on the substrate, and a device coupled to the frame that performs an operation on a surface of the substrate.
Claims4
An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface, the apparatus comprising:
- a frame;
- a transportation system that moves the substrate through the apparatus;
- a substrate support system, coupled to the frame, having a supporting housing and a non-rigid portion comprising a low durometer gel that contacts and supports one of the first surface and the second surface of the substrate during an operation on the substrate, wherein the low durometer gel is contained in the supporting housing and conforms to the one of the first surface and the second surface of the substrate during the performance of an operation on the substrate and resumes to a relaxed state after performance of an operation on the substrate upon transferring the substrate from the apparatus;
- and
- a device coupled to the frame that performs an operation on the other of the one of the first surface and the second surface of the substrate.
Dependencies are inferred from the claim text.