Cleaning assembly
AssigneeVanguard International Semiconductor Corporation
InventorFu-Hsiung Tsai
Life of this patent
Estimating the term…
Abstract
A cleaning assembly for a pipe. The assembly comprises a sleeve, at least one magnet, and at least one moveable hollow member. The sleeve is moveably disposed on the outer wall of the pipe. The at least one magnet is disposed on the inner surface of the sleeve. The at least one moveable hollow member conforms to the profile of the pipe's interior and is disposed in the interior of the pipe and is metal. When an external force acts on the sleeve along the longitudinal axis of the pipe, the at least one moveable hollow member moves with the sleeve by means of magnetic attraction to clean condensed powder from the pipe.
Claims24
A cleaning assembly for a pipe, comprising:
- a sleeve, moveably disposed on an outer wall of the pipe;
- at least one magnet, disposed on an inner surface of the sleeve;
- a plurality of moveable hollow members, conforming to the profile of a pipe's interior, disposed in the interior of the pipe and are metal;
- and
- a connecting element comprising at least one rigid wire respectively connected to the plurality of moveable hollow members,
- wherein an external force acts on the sleeve along a longitudinal axis of the pipe, and the moveable hollow members move with the sleeve by means of magnetic attraction to clean condensed powder from the pipe.
A piping system for semiconductor process, comprising:
- a pipe, of non-magnetic material;
- a sleeve, disposed on an outer wall of the pipe;
- at least one magnet, disposed on an inner surface of the sleeve;
- a plurality of moveable hollow members, conforming to the profile of a pipe's interior, disposed in the interior of the pipe and are metal;
- and
- a connecting element comprising at least one rigid wire respectively connected to the plurality of moveable hollow members,
- wherein an external force acts on the sleeve along a longitudinal axis of the pipe, and the moveable hollow members move with the sleeve by means of magnetic attraction to clean condensed powder from the pipe.
A piping system for semiconductor process, comprising:
- a vacuum chamber;
- a pump;
- a pipe, connected to the vacuum chamber and the pump, of non-magnetic material;
- a sleeve, disposed on the outer wall of the pipe;
- a sleeve, disposed on the outer wall of the pipe;
- at least one magnet, disposed on the inner surface of the sleeve;
- a plurality of moveable hollow members, conforming to the profile of the pipe's interior, disposed in the interior of the pipe and made of metal;
- and
- a connecting element comprising at least one rigid wire respectively connected to the plurality of moveable hollow members,
- wherein an external force acts on the sleeve along the longitudinal axis of the pipe, and the moveable hollow members move with the sleeve by means of magnetic attraction to clean condensed powder from the pipe.
A piping system for semiconductor process, comprising:
- a pump;
- a trap;
- a pipe, connected to the outlet of the pump and the trap, and made of non-magnetic material;
- a sleeve, disposed on the outer wall of the pipe;
- at least one magnet disposed on the inner surface of the sleeve;
- a plurality of moveable hollow members, conforming to the profile of the pipe's interior, disposed in the interior of the pipe and are metal;
- and
- a connecting element comprising at least one rigid wire respectively connected to the plurality of moveable hollow members,
- wherein an external force acts on the sleeve along the longitudinal axis of the pipe, and the moveable hollow members move with the sleeve by means of magnetic attraction to clean condensed powder from the pipe.
An apparatus, comprising:
- a first chamber;
- a second chamber;
- a pipe, connected to the first chamber and the second chamber, made of non-magnetic material;
- a sleeve, disposed on the outer wall of the pipe;
- at least one magnet, disposed on the inner surface of the sleeve;
- a plurality of moveable hollow members, conforming to the profile of the pipe's interior, disposed in the interior of the pipe and are metal;
- and
- a connecting element comprising at least one rigid wire respectively connected to the plurality of moveable hollow members,
- wherein an external force acts on the sleeve along the longitudinal axis of the pipe, and the moveable hollow members move with the sleeve by means of magnetic attraction to clean condensed powder from the pipe.
Dependencies are inferred from the claim text.