Tool reserve for single fabrication and homogenous MES
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorMei-Yin Shen
Life of this patent
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Abstract
A system is disclosed for an integrated manufacturing execution system, MES, that unifies the production data for a manufactured lot that moves from a current production line to different production lines, and a process is disclosed for reserving tools by a unified MES that checks for manufacturing capacity utilization of the tools.
Claims10
A system for an integrated manufacturing execution system, MES, that unifies the production data for a manufacturing lot that moves from a current production line to different production lines, comprising:
- a database recording data pertaining to, a manufacturing lot ID identifying the manufacturing lot, a current MES associated with the lot ID, MES rules and transactions performed to manufacture the manufacturing lot identified by the lot ID;
- a memory storing data recorded in the database;
- a computer of the current production line, the computer communicating with the database and with production line MESs of each of the different production lines to which the manufacturing lot identified by the lot ID is moved to perform the transactions;
- the database supplying the different production lines with MES rules of the current production line;
- and
- the database recording transaction data, for each transaction performed on the manufacturing lot, in the current MES, whereby the current MES unifies the production data for the manufacturing lot.
A method for unifying manufacturing capacity utilization with a unified MES, comprising the steps of:
- checking capacity utilization status of multiple tools for performing the next process step on a manufacturing lot;
- reserving one of the tools to perform a next process step;
- transferring the manufacturing lot from a current production line to a backup production line having the reserved one of the tools;
- and
- performing the next process step in the backup production line, and collecting process data and measurement data, which correspond to the MES rules of the current production line.
Dependencies are inferred from the claim text.