Electron amplifier utilizing carbon nanotubes and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJung-na Heo, Whi-kun Yi, Jeong-hee Lee, Se-gi Yu, Tae-won Jeong, Chang-soo Lee
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AssigneeSamsung Electronics Co., Ltd.
InventorsJung-na Heo, Whi-kun Yi, Jeong-hee Lee, Se-gi Yu, Tae-won Jeong, Chang-soo Lee
Estimating the term…
An electron amplifier and a method of manufacturing the same are provided. The electron amplifier includes a substrate in which a plurality of through holes are formed, a resistive layer deposited on the sidewalls of the through holes, an electron emissive layer including carbon nanotubes which is deposited on the resistive layer, and an electrode layer formed on each of the upper and lower sides of the substrate. Because the electron emissive layer of the electron amplifier is uniform and provides a high electron emission efficiency, the electron amplification efficiency is improved. The electron amplifier manufacturing method enables economical mass production of electron amplifiers.
A method of manufacturing an electron amplifier, the method comprising the steps of:
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