3-axis straight-line motion stage and sample test device using the same

A sample test device using a 3-axis straight line motion stage, the device comprising:

• a 3-axis straight line motion stage supporting a predetermined sample and shifting the sample independently, precisely and exactly in the direction of the X-axis, the Y-axis or the Z-axis;
• and
• an atom microscope provided with the 3-axis straight-line motion stage for measuring the location of the sample using a laser and for scanning the sample;
• the 3-axis straight line motion stage comprising:
• a bottom plate having predetermined area and thickness;
• an X-axis stage, fixed in a reference area of the bottom plate, for moving in the direction of X-axis a first X area positioned from the reference area to the direction of the X-axis;
• a Y-axis stage positioned within the first X area and fixed in a second X area, which is located within the first X area, for moving in the direction of the Y-axis a second Y area positioned from the second X area to the direction of the Y-axis;
• and
• a Z-axis stage fixed in the second Y area which is located within the first Y area and supports a predetermined sample for moving the sample in the direction of the Z-axis,
• the Y-axis stage comprising:
• a piezoelectric element having a predetermined length, the length being changed in the direction of the X-axis according to an input voltage, and a first Y driving part and a second Y driving part connected to both ends of a longitudinal direction of the piezoelectric element, respectively, and fixed to a first Y end of the second X area for moving a second Y end opposite to the first Y end in the Y-axis direction on the basis of the piezoelectric element,
• wherein, the X-axis, the Y-axis and the Z-axis indicate axes of rectangular coordinates, respectively.