Methods of forming waveguides and waveguides formed therefrom
AssigneeShipley Company, L.L.C.
InventorsJames G. Shelnut, Matthew L. Moynihan, Omari Patterson
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Abstract
Provided are methods of forming optical waveguides. The methods involve: (a) forming over a substrate a layer of a photodefinable composition; (b) exposing a portion of the layer to actinic radiation; (c) developing the exposed layer to form a waveguide core structure; and (d) heating the waveguide core structure to a temperature and for a time effective to reflow the structure such that it becomes at least partially rounded in cross-section. Also provided are optical waveguides formed from the described methods and electronic devices including one or more of the optical waveguides.
Claims20
A method of forming an optical waveguide, comprising:
- (a) forming over a substrate a layer of a photodefinable composition comprising at least one material chosen from substituted or unsubstituted polyamides, polyimides, poly(meth)acrylates, polyurethanes, polycarbonates, epoxies, polysiloxanes, polysilsesquioxanes, norbornenes, silicates, and SOL-Gels;
- (b) exposing a portion of the layer to actinic radiation;
- (c) developing the exposed layer to form a waveguide core structure;
- and
- (d) heating the waveguide core structure to a temperature and for a time effective to reflow the structure such that it becomes at least partially rounded in cross-section.
A method of forming an optical waveguide, comprising:
- (a) providing a substrate having on a surface thereof a cladding layer of a material having an index of refraction;
- (b) forming over a portion of the cladding layer a waveguide core structure comprising at least one material chosen from substituted or unsubstituted polyamides, polyimides, poly(meth)acrylates, polyurethanes, polycarbonates, epoxies, polysiloxanes, polysilsesquioxanes, norbornenes, silicates, and SOL-Gels, and silicon oxides, silicon nitrides, silicon oxynitrides, and doped glasses;
- and
- (c) heating the waveguide core structure to a temperature and for a time effective to reflow the structure such that it becomes at least partially rounded in cross-section, wherein the reflowed structure has an index of refraction greater than the index of refraction of the cladding layer.
A method of forming an optical waveguide, comprising:
- (a) providing a substrate having on a surface thereof a cladding layer of a material having a first index of refraction;
- and
- (b) forming by printing over a portion of the cladding layer a waveguide core structure having a second index of refraction that is greater than the first index of refraction, wherein the waveguide core structure as printed is at least partially rounded in cross-section.
Dependencies are inferred from the claim text.