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US 7,024,057 B2Granted
Optical device having dual microstrip transmission lines with a low-k material and a method of manufacture thereof
AssigneeTriQuint Technology Holding Co.
InventorsGuoliang Li, Thomas G. B. Mason
Life of this patent
Estimating the term…
Abstract
The present invention provides an optical device. In one embodiment, the optical device includes an optical waveguide formed in or over a ridge located on a substrate. The optical device also includes a microstrip transmission line comprising a signal electrode and a ground electrode adjacent the ridge and a low-k dielectric material separating the signal and ground electrodes. The present invention also provides a method for making the optical device.
Claims19
An optical device, comprising:
- an optical waveguide formed over or in a ridge located on a substrate;
- a microstrip transmission line comprising a signal electrode and a ground electrode adjacent said ridge;
- and
- a low-k dielectric material separating said signal and ground electrodes,
- wherein a length of said optical device is about 1 cm, when said device includes a capacitance loading of about 4 pF/cm, an operational bandwidth of at least about 40 GHz at −3 dB, and a modulation voltage (Vπ) of about 2.5V or less.
2 more elements
An optical device, comprising:
- an optical waveguide formed over or in a ridge located on a substrate;
- a microstrip transmission line comprising a signal electrode and a ground electrode adjacent said ridge;
- and
- a low-k dielectric material separating said signal and ground electrodes,
- wherein said microstrip transmission line includes a plurality of electrode contacts located over said optical waveguide and having varying lengths.
2 more elements
A method of manufacturing an optical device, comprising:
- forming an optical waveguide over or in a ridge located on a substrate;
- forming a microstrip transmission line having a ground electrode and signal electrode adjacent said ridge, including locating a low-k material between said ground electrode and said signal electrode;
- and
- manufacturing said optical device with a length of about 1 cm, when said device includes a capacitance loading of about 4 pF/cm, an operational bandwidth of at least about 40 GHz at −3 dB, and a modulation voltage (Vπ) of about 2.5V or less.
1 more element
A method of manufacturing an optical device, comprising:
- forming an optical waveguide over or in a ridge located on a substrate;
- and
- forming a microstrip transmission line having a ground electrode and signal electrode adjacent said ridge, including locating a low-k material between said ground electrode and said signal electrode, wherein forming said microstrip transmission line includes forming a plurality of signal electrode contacts located over said optical waveguide and having varying lengths.
An optical transmitter, comprising:
- an optical source configured to generate an optical signal;
- an optical modulator coupled to said optical source and configured to modulate said optical signal, said optical modulator including:
- an optical waveguide formed over or in a ridge located on a substrate;
- a microstrip transmission line comprising a signal electrode and a ground electrode adjacent said ridge;
- and
- a low-k dielectric material separating said signal and ground electrodes;
- and
- an optical fiber coupled to said optical modulator and configured to carry said modulated optical signal,
- wherein a length of said optical modulator is about 1 cm, when said optical modulator includes a capacitance loading of about 4 pF/cm, an operational bandwidth of at least about 40 GHz at −3 dB, and a modulation voltage (Vπ) of about 2.5V or less.
6 more elements
An optical transmitter, comprising:
- an optical source configured to generate an optical signal;
- an optical modulator coupled to said optical source and configured to modulate said optical signal, said optical modulator including:
- an optical waveguide formed over or in a ridge located on a substrate;
- a microstrip transmission line comprising a signal electrode and a ground electrode adjacent said ridge;
- and
- a low-k dielectric material separating said signal and ground electrodes;
- and
- an optical fiber coupled to said optical modulator and configured to carry said modulated optical signal,
- wherein said microstrip transmission line includes a plurality of electrode contacts located over said optical waveguide and having varying lengths.
6 more elements
An optical device, comprising:
- an optical waveguide formed over or in a ridge located on a substrate;
- a microstrip transmission line adjacent said ridge and having ground and signal electrodes and a low-k material located therebetween;
- and
- a plurality of electrode contacts located over said optical waveguide and having varying lengths.
1 more element
A method of manufacturing an optical device, comprising:
- forming an optical waveguide over or in a ridge located on a substrate;
- and
- forming a microstrip transmission line having a signal electrode and ground electrode adjacent said ridge and including placing a low-k material therebetween;
- and
- forming a plurality of electrode contacts located over said optical waveguide and having varying lengths.
2 more elements
Dependencies are inferred from the claim text.