X-ray fluorescence system with apertured mask for analyzing patterned surfaces

A method for examining a region of a patterned surface, comprising:

• directing excitation x-ray, neutron, particle-beam or gamma ray radiation toward a two-dimensional sample area in the region of the patterned surface;
• detecting emissions emitted from the sample area;
• and
• positioning a mask in a planar radiation path formed by the source, detector and the sample area, and moveable relative to the sample area, the moveable mask including an elongate aperture to substantially confine the excitation radiation directed to the sample area, and the emissions from the sample area, to the planar radiation path when arranged parallel to a first axis of the two-dimensional sample area.

An apparatus for examining a region of a patterned surface, comprising:

• a source for directing excitation x-ray, neutron, particle-beam or gamma ray radiation toward a two-dimensional sample area in the region of the surface;
• a beam controlling optical element for directing the excitation radiation from the source toward the surface;
• a detector for detecting emissions emitted from the sample area;
• and
• a mask positioned in a planar radiation path formed by the source, detector and the sample area, the mask including an elongate aperture to substantially confine the excitation radiation directed to the sample area, and the emissions from the sample area, to the planar radiation path when arranged parallel to a first axis of the two-dimensional sample area.

A method for examining a region of a patterned surface, comprising:

• directing excitation x-ray, neutron, particle-beam or gamma ray radiation toward a two-dimensional sample area in the region of the patterned surface using a beam controlling optical element;
• detecting emissions emitted from the sample area;
• and
• positioning a mask in a planar radiation path formed by the source, detector and the sample area, the mask including an elongate aperture to substantially confine the excitation radiation directed to the sample area, and the emissions from the sample area, to the planar radiation path when arranged parallel to a first axis of the two-dimensional sample area.