Low-pressure axial direction excitation type F2 laser oscillator
AssigneeJapan Science and Technology Agency
InventorTakahisa Jitsuno
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Abstract
An axial direction excitation type F2 laser apparatus comprises a discharge tube consisting of an insulating cylinder and metal electrodes at both ends of thereof, and a reflecting mirror or a transmitting mirror, constituting a resonator, outside the electrodes. A high voltage for pulse discharge is applied to the electrodes from a drive circuit. Total gas pressure in the discharge tube is set in a range between 10 Torr. and 100 Torr., and concentration of F2 gas to total gas in the discharge tube is set to be in a range between 0.2% and 2.0%. This low-pressure axial direction excitation type F2 laser apparatus having small size and high efficiency can be provided at a low cost.
Claims8
A low-pressure axial direction excitation type F2 laser apparatus comprising:
- a discharge tube including an insulating cylinder and a metal electrode at each end of said insulating cylinder;
- and
- a reflecting mirror and a transmitting mirror, constituting a resonator, positioned outwardly of a corresponding said metal electrode, respectively,
- wherein said metal electrode at each end of said insulating cylinder is constructed and arranged to have a high voltage pulse applied thereto from a drive circuit such that an optical axis of laser light generated by oscillation, and a main discharge current, pass through the same path, and
- wherein a total gas pressure in said discharge tube is within a range of from 10 Torr to 100 Torr, and a concentration of F2 gas to total gas within said discharge tube is within a range of from 0.2% to 2.0%.
Dependencies are inferred from the claim text.