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US 7,023,669 B2Granted
Magnetic head using a magneto-resistive effect
AssigneeFujitsu Limited
InventorReiko Kondo
Life of this patent
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Abstract
A fabricating process of a magnetic head includes the steps of forming a magneto-resistive film, forming a resist film on the magneto-resistive film, patterning the resist film to form a resist pattern, conducting a process while using the resist pattern as a mask, causing a shrinkage in the resist pattern, and conducting a second process while using the shrunken resist pattern as a mask.
Claims5
A magnetic head, comprising:
- a magneto-resistive film having a ferromagnetic free layer at a top part thereof, said ferromagnetic free layer changing a magnetization thereof in response to an external magnetic field;
- first and second magnetic domain control patterns provided on said ferromagnetic free layer, each of said first and second magnetic domain control patterns causing a pinning of magnetization in said ferromagnetic free layer in the vicinity thereof;
- a first electrode provided on said ferromagnetic free layer in contact therewith at a region located between said first and second magnetic domain control patterns;
- and
- a second electrode provided in electrical contact with a bottom surface of said magneto-resistive film,
- said magnetic head being a CPP type magnetic head,
- said magnetic head further comprising a first insulating film covering said first magnetic domain control pattern and a second insulating film covering said second magnetic domain control pattern, said first insulating film being interposed between said first magnetic domain control pattern and said first electrode on a top surface of said magneto-resistive film, and said second insulating film being interposed between said second magnetic domain control pattern and said first electrode on the top surface of said magneto-resistive film.
4 more elements
A magnetic head, comprising:
- a magneto-resistive film;
- a pair of magnetic domain control patterns provided at both lateral edges of said magneto-resistive film, each of said magnetic domain control patterns causing a pinning of magnetization in said magneto-resistive film in the vicinity thereof, each of said magnetic domain control patterns being defined by an outer edge;
- a pair of electrodes provided respectively on said pair of magnetic domain control regions with a mutual separation from each other, each electrode having a tip-end part extending over said magneto-resistive film toward the other electrode, each of said electrodes being defined by an outer edge aligned with a corresponding outer edge of a corresponding magnetic domain control pattern underlying said electrode,
- wherein each tip-end part extends beyond said domain control region, on which said electrode having said tip-end part is provided, with a protruding distance of 0.25 μm or less.
1 more element
A magnetic disk apparatus, comprising:
- a rotary magnetic disk;
- and
- a magnetic head scanning over a surface of said magnetic disk,
- said magnetic head comprising:
- a magneto-resistive film having a ferromagnetic free layer at a top part thereof, said ferromagnetic free layer changing a magnetization thereof in response to an external magnetic field;
- first and second magnetic domain control patterns provided on said ferromagnetic free layer, each of said first and second magnetic domain control patterns causing a pinning of magnetization in said ferromagnetic free layer in the vicinity thereof;
- a first electrode provided on said ferromagnetic free layer in contact therewith at a region located between said first and second magnetic domain control patterns;
- and
- a second electrode provided in electrical contact with a bottom surface of said magneto-resistive film,
- said magnetic head being a CPP type magnetic head,
- said magnetic head further comprising a first insulating film covering said first magnetic domain control pattern and a second insulating film covering said second magnetic domain control pattern, said first insulating film being interposed between said first magnetic domain control pattern and said first electrode on a top surface of said magneto-resistive film, and said second insulating film being interposed between said second magnetic domain control pattern and said first electrode on the top surface of said magneto-resistive film.
8 more elements
A magnetic disk apparatus, comprising:
- a rotary magnetic disk;
- and
- a magnetic head scanning over a surface of said magnetic disk,
- said magnetic head comprising:
- a magneto-resistive film;
- a pair of magnetic domain control patterns provided at both lateral edges of said magneto-resistive film, each of said magnetic domain control patterns causing a pinning of magnetization in said magneto-resistive film in the vicinity thereof, each of said magnetic domain control patterns being defined by an outer edge;
- a pair of electrodes provided respectively on said pair of magnetic domain control regions with a mutual separation from each other, each electrode having a tip-end part extending over said magneto-resistive film toward the other electrode, each of said electrodes being defined by an outer edge aligned with a corresponding outer edge of a corresponding magnetic domain control pattern underlying said electrode,
- wherein each tip-end part extends beyond said domain control region, on which said electrode having said tip-end part is provided, with a protruding distance of 0.25 μm or less.
5 more elements
Dependencies are inferred from the claim text.