Digital micromirror device having a window transparent to ultraviolet (UV) light

A digital micromirror device (DMD), comprising:

• a) a base element having a first side and a second side, said first side provided with a two dimensional array of individually addressable mirrors;
• b) a frame having an aperture at least the size of the mirror array;
• c) a window between said frame and said base element, said window comprising a material adapted to permit at least 90% transmissibility of UV wavelengths at 185-nm and above;
• d) a plurality of clamping arms extending about said frame and said second side of said base element such that said window is clamped between said frame and said base element with a clamping force;
• e) an elastomeric element situated between said window and said base element, wherein said clamping force and said elastomeric element effect a hermetic seal about said array of mirrors;
• f an upstanding ring structure on said first side of said base element situated between said base element and said window, said upstanding ring having a topmost portion with a first surface area;
• and
• g) an outer base ring having a substantially flat upper surface with a second surface area greater than said first surface area, said base ring bonded to at least one of
• (i) said upstanding ring structure, and
• (ii) said base element about said upstanding ring structure,
• wherein said window is bonded to said second surface of said base ring.

A digital micromirror device (DMD), comprising:

• a) a base element having a first side and a second side, said first side provided with a two dimensional array of individually addressable mirrors;
• b) a window over said base element, said window comprising a material adapted to permit at least 80% transmissibility of UV wavelengths at 185-nm and above;
• c) an epoxy bond between said window and said base element;
• and
• d) an elastomeric o-ring situated between said window and said first side of said base element.

A digital micromirror device (DMD), comprising:

• a) a base having a first side and a second side, said first side provided with a two dimensional array of individually addressable mirrors and a metal allay seal ring about said array of mirrors;
• b) a window over said seal ring, said window comprising a material adapted to permit at least 80% transmissibility of UV wavelengths at 1 85-nm and above;
• c) an epoxy bond between said window and at least one of said seal ring and said base;
• and
• d) an elastomeric o-ring situated between said window and at least one of said seal ring and said base.

A digital micromirror device (DMD), comprising:

• a) a base having a first side and a second side, said first side provided with a two dimensional array of individually addressable minors;
• b) a window coupled to said base wit screws, said window comprising a material adapted to permit at least 80% transmissibility of UV wavelengths at 185-nm and above;
• and
• c) an elastomeric o-ring situated between said window and said first side of said base.

A digital micromirror device (DMD), comprising:

• a) a base element having a first side and a second side, said first side provided with a two dimensional array of individually addressable mirrors;
• b) a window comprising a material adapted to permit at least 80% transmissibility of UV wavelengths at 185-nm and above;
• and
• c) a frame bonded to both said window and said base element, wherein said frame is constructed of a material having a CTE closer to the window material than 5.2 ×1031 6/° C.

A digital micromirror device (DMD), comprising:

• a) a base element having a first side and a second side, said first side provided with a two dimensional array of individually addressable mirrors;
• b) a base ring on said base element and about said array of mirrors;
• c) a window comprising a material adapted to permit at least 80% transmissibility of UV wavelengths at 185-nm and above;
• and
• d) a frame about said window;
• and
• e) a gasket between said base ring and said frame.