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US 7,023,603 B2Granted
Micro-mirror device including dielectrophoretic microemulsion
AssigneeHewlett-Packard Development Company, L.P.
InventorPaul F. Reboa
Life of this patent
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Abstract
A micro-mirror device includes a substrate having a surface, and a plate spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity therebetween. A dielectrophoretic microemulsion capable of movement when an electrical signal is applied to the micro-mirror device is disposed in the cavity, and a reflective element is interposed between the surface of the substrate and the plate such that the reflective element is adapted to move between a first position and at least one second position. The dielectrophoretic microemulsion has a continuous oil phase.
Claims41
A micro-mirror device, comprising:
- a substrate having a surface;
- a plate spaced from the substrate and having a surface oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
- a dielectrophoretic microemulsion disposed in the cavity, the dielectrophoretic microemulsion being capable of movement when an electrical signal is applied to the device, the dielectrophoretic microemulsion having at least a continuous oil phase;
- and
- a reflective element interposed between the surface of the substrate and the plate,
- wherein the reflective element is adapted to move between a first position and at least one second position, and reflect light through the surface of the plate.
3 more elements
A micro-mirror device, comprising:
- a substrate having a surface;
- a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
- a dielectrophoretic microemulsion disposed in the cavity, the dielectrophoretic microemulsion being capable of movement when an electrical signal is applied to the device, the dielectrophoretic microemulsion having at least a continuous oil phase;
- and
- a reflective element interposed between the surface of the substrate and the plate,
- wherein the reflective element is adapted to move between a first position and at least one second position, and
- wherein the dielectrophoretic microemulsion comprises a polar component, a non-polar component, and an amphipathic component.
4 more elements
A micro-mirror device, comprising:
- a substrate having a surface;
- a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
- a dielectrophoretic microemulsion disposed in the cavity, the dielectrophoretic microemulsion being capable of movement when an electrical signal is applied to the device, the dielectrophoretic microemulsion having at least a continuous oil phase;
- and
- a reflective element interposed between the surface of the substrate and the plate,
- wherein the reflective element is adapted to move between a first position and at least one second position, and
- wherein the dielectrophoretic microemulsion comprises an anionic surfactant.
4 more elements
A micro-mirror device, comprising:
- a substrate having a surface;
- a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
- a dielectrophoretic microemulsion disposed in the cavity, the dielectrophoretic microemulsion being capable of movement when an electrical signal is applied to the device, the dielectrophoretic microemulsion having at least a continuous oil phase;
- and
- a reflective element interposed between the surface of the substrate and the plate,
- wherein the reflective element is adapted to move between a first position and at least one second position, and
- wherein the dielectrophoretic microemulsion is adapted to increase an actuation force on the reflective element as generated by a given activation energy.
4 more elements
A micro-actuator, comprising:
- a substrate having a surface;
- a transparent plate spaced from the substrate and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
- a dielectrophoretic microemulsion disposed in the cavity and capable of movement when an electrical signal is applied to the micro-actuator, the dielectrophoretic microemulsion having a continuous oil phase;
- and
- an actuating element supported by the substrate and interposed between the surface of the substrate and the plate,
- wherein the actuating element is adapted to move between a first position and at least one second position.
3 more elements
A micro-actuator, comprising:
- a substrate having a surface;
- a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
- a dielectrophoretic microemulsion disposed in the cavity and capable of movement when an electrical signal is applied to the micro-actuator, the dielectrophoretic microemulsion having a continuous oil phase;
- and
- an actuating element interposed between the surface of the substrate and the plate,
- wherein the actuating element is adapted to move between a first position and at least one second position,
- wherein the dielectrophoretic microemulsion comprises an anionic surfactant.
4 more elements
A micro-actuator, comprising:
- a substrate having a surface;
- a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
- a dielectrophoretic microemulsion disposed in the cavity and capable of movement when an electrical signal is applied to the micro-actuator, the dielectrophoretic microemulsion having a continuous oil phase;
- and
- an actuating element interposed between the surface of the substrate and the plate,
- wherein the actuating element is adapted to move between a first position and at least one second position,
- wherein the dielectrophoretic microemulsion is adapted to increase an actuation force on the actuating element as generated by a given activation energy.
4 more elements
A method of using a dielectrophoretic microemulsion in a micro-actuator including an actuator element adapted to move between a first position and at least one second position, the method comprising:
- disposing the dielectrophoretic microemulsion in a cavity of the micro-actuator as defined between a substrate and a transparent plate spaced from the substrate and oriented substantially parallel to a surface of the substrate, including at least one of positioning the actuator element above and submerging the actuator element in the dielectrophoretic microemulsion;
- and
- moving the actuator element, as supported by the substrate and interposed between the surface of the substrate and the plate, between the first position and the least one second position, including applying an electrical signal to the micro-actuator,
- wherein the dielectrophoretic microemulsion has a continuous oil phase, and
- wherein the dielectrophoretic microemulsion exhibits movement when the electrical signal is applied to the micro-actuator and the movement contributes to the moving of the actuator element between the first position and the at least one second position.
2 more elements
A method of using a dielectrophoretic microemulsion in a micro-actuator including an actuator element adapted to move between a first position and at least one second position, the method comprising:
- disposing the dielectrophoretic microemulsion in a cavity of the micro-actuator, including at least one of positioning the actuator element above and submerging the actuator element in the dielectrophoretic microemulsion;
- and
- moving the actuator element between the first position and the least one second position, including applying an electrical signal to the micro-actuator,
- wherein the dielectrophoretic microemulsion has a continuous oil phase, and
- wherein the dielectrophoretic microemulsion exhibits movement when the electrical signal is applied to the micro-actuator and the movement contributes to the moving of the actuator element between the first position and the at least one second position,
- wherein the dielectrophoretic microemulsion comprises an anionic surfactant.
3 more elements
A method of using a dielectrophoretic microemulsion in a micro-actuator including an actuator element adapted to move between a first position and at least one second position, the method comprising:
- disposing the dielectrophoretic microemulsion in a cavity of the micro-actuator, including at least one of positioning the actuator element above and submerging the actuator element in the dielectrophoretic microemulsion;
- and
- moving the actuator element between the first position and the least one second position, including applying an electrical signal to the micro-actuator,
- wherein the dielectrophoretic microemulsion has a continuous oil phase, and
- wherein the dielectrophoretic microemulsion exhibits movement when the electrical signal is applied to the micro-actuator and the movement increases an actuation force on the actuator element as generated by a given actuation energy.
2 more elements
Dependencies are inferred from the claim text.