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US 7,023,562 B2Granted
Characterization of period variations in diffraction gratings
AssigneeZygo Corporation
InventorXavier Colonna De Lega
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Abstract
Methods and systems for interferometrically characterizing diffractive elements are disclosed.
Claims31
A method for interferometrically characterizing a diffractive element, comprising:
- producing a first phase profile of the diffractive element based on a zeroth order wavefront diffracted from the diffractive element;
- producing a second phase profile of the diffractive element based on a non-zero order wavefront diffracted from the diffractive element;
- and
- characterizing the diffractive element based on the first and second phase profiles.
1 more element
Dependencies are inferred from the claim text.