Device inspecting for defect on semiconductor wafer surface
AssigneeRenesas Technology Corp.
InventorsMariko Mizuo, Toshiharu Katayama
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Abstract
An inspection device inspecting for a defect of a semiconductor wafer based on an image of the wafer surface includes an imaging device obtaining image data of a wafer subjected to inspection, a storage circuit storing reference image data of the wafer, an image comparison unit comparing the image data of the wafer subjected to inspection and the reference image data using an inspection condition, an acquiring circuit acquiring wafer in process (WIP) data of the wafer subjected to inspection, and a WIP data operating unit setting the inspection condition based on the WIP data obtained.
Claims13
A wafer defect inspection device inspecting for a defect based on an image of a wafer surface, comprising:
- imaging means for obtaining image data of a wafer subjected to inspection;
- storage means for storing reference image data;
- comparing means for comparing the image data of the wafer subjected to inspection and the reference image data using an inspection condition;
- acquiring means for acquiring wafer in process (WIP) data for the wafer subjected to inspection;
- and
- setting means for setting the inspection condition for the wafer subjected to inspection based on the WIP data acquired for the wafer subjected to inspection.
A wafer defect inspection device inspecting for a defect based on an image of a wafer surface, comprising:
- imaging means for obtaining image data of a wafer subjected to inspection;
- storage means for storing reference image data;
- comparing means for comparing the image data of the wafer subjected to inspection and the reference image data using an inspection condition;
- autofocusing means for focusing of said imaging means in a micro area of the wafer subjected to inspection;
- and
- setting means for calculating height of the wafer in the micro area based on the focusing position, and setting the inspection condition based on the height calculated.
Dependencies are inferred from the claim text.