Multibeam exposure device

A multibeam exposure device scanning an exposure member in a given direction and forming an image on an exposure surface of the exposure member, the multibeam exposure device comprising:

• a light source emitting a light beam;
• an exposure head having a spatial light modulator which modulates the light beam into an exposure beam corresponding to an image to be formed, and which can selectively turn a plurality of pixels on and off;
• a light quantity data measuring mechanism measuring light quantity data of the exposure beam;
• and
• a feeding operation mechanism moving the light quantity data measuring mechanism in a direction intersecting a scanning direction with respect to the exposure surface,
• wherein the light quantity data measuring mechanism comprising:
• an opening plate disposed substantially flush with the exposure surface and blocking light which is other than an object of measurement of light quantity data at the spatial light modulator, an opening being formed in the opening plate, the opening allowing passage of the exposure beam which corresponds to a pixel which is an object of measurement of light quantity data at the spatial light modulator;
• a feeding operation mechanism moving the opening plate such that the opening is moved in a direction intersecting the scanning direction at a time of scan-exposure;
• and
• a light-receiving element measuring a light quantity of the exposure beam which passes through the opening.

An exposure method for carrying out exposure processing by irradiating, onto an exposure surface of a photosensitive material, an exposure beam obtained by modulating, by a spatial light modulator and in accordance with an image to be exposed and formed, a light beam which is emitted from a light source, the exposure method comprising:

• measuring a light quantity of the exposure beam which passes through an opening with a light-receiving element, the opening being provided in an opening plate disposed on the exposure surface and blocking light which is other than an object of measurement of light quantity data at the spatial light modulator, the opening allowing passage of the exposure beam which corresponds to a pixel which is an object of measurement of light quantity data at the spatial light modulator;
• adjusting exposure quantity and/or light quantity distribution on the exposure surface on the basis of the measured light quantity data;
• and
• carrying out exposure by irradiating, onto an exposure surface of a photosensitive material, an exposure beam obtained by modulating, by a spatial light modulator and in accordance with an image to be exposed and formed, a light beam which is emitted from a light source.