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US 7,023,316 B2Granted
Semiconductor device with electrically coupled spiral inductors
AssigneeMicron Technology, Inc.
InventorsKie Y. Ahn, Leonard Forbes
Life of this patent
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Abstract
Multiple coupled inductors are formed in a well in a semiconductor device. The inductors, which preferably are spiral inductors, are strongly coupled with high quality factors. The coupled inductors may be used as efficient signal splitting and combining circuits.
Claims17
A semiconductor comprising:
- a semiconductor substrate having a downwardly extending cavity formed therein;
- a first spiral conductor formed in the cavity, said first spiral conductor being fabricated substantially in a first horizontal plane within the cavity;
- and
- a second spiral conductor formed in the cavity, said second spiral conductor being fabricated substantially in a second horizontal plane within the cavity and above the first plane, wherein the first and second spiral conductors are electrically isolated from one another and are positioned to be inductively coupled during operation.
1 more element
Dependencies are inferred from the claim text.