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US 7,023,220 B2Granted
Method for measuring nm-scale tip-sample capacitance
AssigneeThe Ohio State University
InventorsJonathan P. Pelz, David T. Lee, Bharat Bhushan
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Abstract
A method for measuring nm-scale tip-sample capacitance including (a) measuring a cantilever deflection and a change in probe-sample capacitance relative to a reference level as a function of a probe assembly height; (b) fitting out-of-contact data to a function; (c) subtracting the function from capacitance data to get a residual capacitance as a function of the probe assembly height; and (d) determining the residual capacitance at a z-position where the cantilever deflection is zero.
Claims4
A method for measuring nm-scale tip-sample capacitance, said method comprising:
- measuring a cantilever deflection and a change in probe-sample capacitance relative to a reference level as a function of a probe assembly height;
- fitting out-of-contact data to a function;
- subtracting said function from capacitance data to get a residual capacitance as a function of said probe assembly height;
- and
- determining said nm-scale tip-sample capacitance by equating said residual capacitance at a z-position where said cantilever deflection is zero.
2 more elements
Dependencies are inferred from the claim text.