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AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsOsamu Watanabe, Takanori Nakano, Kazunari Chikanawa, Shogo Matsubara, Shintaro Hara, Kazuo Nishimura
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A ferroelectric element is described which has a structure including a common electrode 11, a ferroelectric film 10 formed on the common electrode 11, an individual electrode 3 formed on the ferroelectric film 10, a lead wire 15 for feeding electric power to the individual electrode 3, which is formed on the same plane as of the individual electrode 3, and a protection film 16 entirely covering the exposed parts of the ferroelectric film 10 and the individual electrode 3, and covering the lead wire 15. The protection film 16 is preferably made of a material whose Young's modulus is smaller than that of the ferroelectric film 10, exactly 1/20 or smaller of the Young's modulus of the ferroelectric film 10. Further, the ferroelectric film is formed with the insulation reinforcing film containing at least one of the elements constituting the ferroelectric film.
A ferroelectric element comprising:
A ferroelectric element according to claim 3, wherein said ferroelectric film being formed with an insulation reinforcing film containing at least one of the elements constituting said ferroelectric film.
A ferroelectric element comprising:
A ferroelectric element comprising:
A ferroelectric element comprising:
A ferroelectric element comprising:
A ferroelectric element comprising:
A ferroelectric element comprising:
Dependencies are inferred from the claim text.