Method and device for observing a specimen in a field of view of an electron microscope
AssigneeHitachi, Ltd.
InventorsHiromi Inada, Isao Nagaoki, Hiroyuki Kobayashi
Life of this patent
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Abstract
The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.
Claims3
An electron microscope comprising:
- a support for supporting a specimen;
- a deflector for deflecting an electron beam to the specimen to form images;
- an image pickup device for obtaining the images;
- and
- a processor coupled to the image pickup device being programmed for observing the specimen in a field of view of the electron microscope, said programming comprising the act of:
- calculating a degree of coincidence of images obtained by differential electro-optical conditions of the electron microscope;
- determining whether the image of the field of view is suitable or not for an observation based on calculated degree;
- and
- moving the field of view to a next position when the image of the field of view is determined to be not suitable.
An electron microscope comprising:
- a support for supporting a specimen;
- a deflector for deflecting an electron beam to the specimen to form images;
- an image pickup device for obtaining the images;
- and
- a processor coupled to the image pickup device being programmed for observing the specimen in a field of view of the electron microscope, said programming comprising the act of:
- calculating a phase only correlation or a phase-amplitude correlation of images obtained by differential electro-optical conditions of the electron microscope;
- determining whether the image of the field of view is suitable or not for an observation based on calculated degree;
- and
- moving the field of view to a next position when the image of the field of view is determined to be not suitable.
A method of observing a specimen in a field of view of an electron microscope comprising the acts of:
- deflecting an electron beam to the specimen to form images;
- acquiring said images from the specimen using an image pickup device;
- and
- observing the images in a field of view of the electron microscope using programming from a processor, said programming including the acts of:
- calculating a degree of coincidence of images obtained by differential electro-optical conditions of the electron microscope;
- determining whether the image of the field of view is suitable or not for an observation based on calculated degree;
- and
- moving the field of view to a next position when the image of the field of view is determined to be not suitable.
Dependencies are inferred from the claim text.