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US 7,022,622 B2Granted
Method and structure to improve properties of tunable antireflective coatings
AssigneeInternational Business Machines Corporation
InventorsKangguo Cheng, Ramachandra Divakaruni
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Abstract
A method for improving the properties of tunable etch resistant anti-reflective coatings (TERA) is disclosed. The method includes annealing the deposited layer of TERA in an environment containing at least one of hydrogen and deuterium. The annealed layer has an increased concentration of hydrogen and/or deuterium as compared to the deposited film, and may also have an additional concentration of hydrogen or deuterium at the interface between the substrate and the layer of TERA.
Claims19
A method comprising:
- depositing on a surface of a substrate a layer formed of a material comprising carbon, hydrogen, deuterium and at least one element selected from the group consisting of Si, Ge, B, Sn, Fe and Ti;
- and
- annealing said layer in an environment comprising at least one of hydrogen and deuterium, thereby forming an annealed layer.
A method comprising:
- depositing on a surface of a substrate a layer formed of a material comprising carbon, deuterium and at least one element selected from the group consisting of Si, Ge, B, Sn, Fe and Ti;
- and
- annealing said layer in an environment comprising at least one of hydrogen and deuterium, thereby forming an annealed layer.
Dependencies are inferred from the claim text.