Interdigitaded capacitors

Method for the manufacture of a capacitor pair device, the capacitor pair device having a first capacitor and a second capacitor, comprising the steps of:

• a. providing a substrate,
• b. depositing an electrically conductive layer on the substrate,
• c. patterning the conductive layer in a single operation to form:
• i. a first conductive comb structure forming another plate of the first capacitor of the capacitor pair,
• ii. a second conductive comb structure forming a plate of the second capacitor of the capacitor pair, the second conductive comb structure interdigitated with the first conductive comb structure,
• iii. a first continuous conductive runner interleaved between the first conductive comb structure and the second conductive comb structure, the first continuous conductive runner forming the first capacitor with the first conductive comb structure,
• iv. a second continuous conductive runner parallel to the first continuous conductive runner, and interleaved between the first continuous conductive runner and the second conductive comb structure, the second continuous conductive runner forming the second capacitor with the second conductive comb structure, thus forming the capacitor pair.

A method of manufacturing an integrated circuit including a capacitor pair, the capacitor pair comprising a first capacitor and a second capacitor, comprising the steps of

• a. providing a substrate,
• b. depositing an electrically conductive layer on the substrate,
• c. patterning the conductive layer in a single operation to form:
• i. a first conductive comb structure forming a plate of the first capacitor of the capacitor pair,
• ii. a second conductive comb structure forming another plate of the second capacitor of the capacitor pair, the second conductive comb structure interdigitated with the first conductive comb structure, and
• iii. a continuous conductive runner interleaved between the first conductive comb structure and the second conductive comb structure, the continuous conductive runner forming the first capacitor with the first comb structure and the second capacitor with the second conductive comb structure, thus forming the capacitor pair.