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US 7,022,537 B2Granted
Liquid crystal display device and fabricating method thereof, and reworking method of alignment film using the same
AssigneeLG.Philips LCD Co., Ltd.
InventorsKyo Ho Moon, Yong In Park
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Abstract
A liquid crystal display device includes a substrate, an organic insulating film formed on the substrate, an alignment film having a first etch rate formed on the organic insulating film, and a silicon nitride layer having a second etch rate formed between the alignment film and the organic insulating film, wherein the first etch rate is different from the second etch rate.
Claims9
A method of reworking an alignment film of a liquid crystal display device, comprising the steps of:
- forming an organic protective film on a substrate;
- forming a silicon nitride layer having a first etch rate on the organic protective film;
- forming a first alignment film on the silicon nitride layer;
- detecting at least one irregularity of the first alignment film formed on the silicon nitride layer;
- eliminating the first alignment film with a second etch rate different from the first etch rate of the silicon nitride layer;
- and
- forming a second alignment film on the silicon nitride layer.
4 more elements
Dependencies are inferred from the claim text.