Method in connection with the production of a template and the template thus produced
AssigneeObducat Aktiebolag
InventorBabak Heidari
Life of this patent
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Abstract
Method in connection with the production of a template, preferably for nanoimprint lithography, which template comprises a flat plate (1) of a first material and a three-dimensional structure (6, 8) of a second material, arranged on the plate, said second material introductory being applied on said plate, in the method, to form the structure. The second material is thereafter fixed to the plate the second material is thereafter fixed to the plate of the first material, by heat treatment (Q) at at least 100° C., for the production of the template. A template is produced by use of the method.
Claims11
A method for producing an imprint template having a durable imprint surface with an imprint relief pattern, said method comprising the following steps:
- providing a plate of a first material having a flat surface;
- providing an imprint relief pattern of a second material on the flat surface of said flat plate;
- fixing said imprint relief pattern of said second material to the plate of said first material, by heating said first and second material at a temperature above about 150° C. and below the melting temperature of said first and second material, thereby forming said durable imprint surface.
Dependencies are inferred from the claim text.