US 7,022,462 B1 · Photosensitive resin composition, photosensitive element using the same, process for producing resist pattern, and process for producing printed wiring board

Abstract

A photosensitive resin composition comprising (A) a carboxyl group-containing binder polymer which contains styrene or a styrene derivative as a copolymerized constituent, (B) a photo-polymerization initiator, and (C) a photo-polymerizable compound which has in its molecule at least one polymerizable ethylenically unsaturated bond and comprises a compound represented by the general formula (I) wherein R1 is a hydrogen atom or a methyl group, A is an alkylenoxy group, Z1 is a halogen atom, an alkyl group, a cycloalkyl group, an aryl group, an amino group, an alkylamino group, a dialkylamino group, a nitro group, a cyano group, a mercapto group, an alkylmercapto group, an allyl group, a hydroxyalkyl group, a carboxyalkyl group, an acyl group, an alkoxy group or a group containing an heterocyclic group, m is an integer of 4 to 20, and n is an integer of 0 to 5.

Claims26

Dependent claims

A photosensitive resin composition comprising

(A) a carboxyl group-containing binder polymer which contains styrene or a styrene derivative as a copolymerized constituent,
(B) a 2,4,5-triarylimidazole dimer as a photo-polymerization initiator, and
(C) a photo-polymerizable compound having in its molecule at least one polymerizable ethylenically unsaturated bond which comprises a compound represented by the general formula (I)
wherein R1 is a hydrogen atom or a methyl group, A is an alkylenoxy group of 2 to 6 carbon atoms, Z1 is a halogen atom, an alkyl group of 1 to 20 carbon atoms, a cycloalkyl group of 3 to 10 carbon atoms, an aryl group of 6 to 14 carbon atoms, an amino group, an alkylamino group of 1 to 10 carbon atoms, a dialkylamino group of 2 to 20 carbon atoms, a nitro group, a cyano group, a mercapto group, an alkylmercapto group of 1 to 10 carbon atoms, an allyl group, a hydroxyalkyl group of 1 to 20 carbon atoms, a carboxyalkyl group wherein the alkyl group has 1 to 10 carbon atoms, an acyl group having an alkyl group of 1 to 10 carbon atoms, an alkoxy group of 1 to 20 carbon atoms or a group containing an heterocyclic group, m is an integer of 6 to 20, and n is an integer of 0 to 5.

1 more element

A photosensitive resin composition comprising

(A) a carboxyl group-containing binder polymer which contains styrene or a styrene derivative as a copolymerized constituent;
(B) a 2,4,5-triarylimidazole dimer as a photo-polymerization initiator, and
(C′) a photo-polymerizable compound having in its molecule at least one polymerizable ethylenically unsaturated bond which comprises a compound represented by the general formula (V)
wherein R1 is a hydrogen atom or a methyl group, B is an ethylenoxy group, Z1 is a halogen atom, an alkyl group of 1 to 20 carbon atoms, a cycloalkyl group of 3 to 10 carbon atoms, an aryl group of 6 to 14 carbon atoms, an amino group, an alkylamino group of 1 to 10 carbon atoms, a dialkylamino group of 2 to 20 carbon atoms, a nitro group, a cyano group, a mercapto group, an alkylmercapto group of 1 to 10 carbon atoms, an allyl group, a hydroxyalkyl group of 1 to 20 carbon atoms, a carboxyalkyl group wherein the alkyl group has 1 to 10 carbon atoms, an acyl group having an alkyl group of 1 to 10 carbon atoms, an alkoxy group of 1 to 20 carbon atoms or a group containing an heterocyclic group, at least one Z1 is an alkyl group of 1 to 20 carbon atoms, m is an integer of 6 to 18, and n is an integer of 1 to 5.

1 more element

Dependencies are inferred from the claim text.

Photosensitive resin composition, photosensitive element using the same, process for producing resist pattern, and process for producing printed wiring board

Life of this patent

Photosensitive resin composition, photosensitive element using the same, process for producing resist pattern, and process for producing printed wiring board

Life of this patent

Abstract

Claims26