Exhaust apparatus for process apparatus and method of removing impurity gas
AssigneeTokyo Electron Limited
InventorToshio Hasegawa
Life of this patent
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Abstract
An exhaust apparatus for a process apparatus which processes an object using a process gas includes an exhaust pipe to be connected to an exhaust port of the process apparatus, and a trap mechanism connected to the exhaust pipe, for removing an impurity gas contained in an exhaust gas from the process apparatus. A reaction-gas supply mechanism is provided in the exhaust pipe at an upstream of the trap mechanism, for feeding a reaction gas which is reacted with the impurity gas in to exhaust pipe to lower a vapor pressure of the impurity gas.
Claims12
A method for removing an impurity gas discharged from a process apparatus used for processing objects by using a process gas, comprising:
- evacuating an interior of the process apparatus, thereby drawing the impurity gas through an exhaust pipe connecting the process apparatus and a trap mechanism;
- mixing a reaction gas to react with the impurity gas within the exhaust pipe at a location between the process apparatus and the trap mechanism to convert the impurity gas to reaction by-products having a lower vapor pressure than that of the impurity gas;
- and
- condensing the reaction by-products so that the condensed reaction by-products are trapped in the trap mechanism.
A method for removing an impurity gas discharged from a process apparatus used for processing objects by using a process gas, comprising:
- evacuating an interior of the process apparatus, thereby drawing the impurity gas through an exhaust pipe connecting the process apparatus and a trap mechanism;
- mixing a reaction gas to react with impurity gas in the trap mechanism to convert the impurity gas to reaction by-products having a lower vapor pressure than that of the impurity gas;
- and
- condensing the reaction by-products so that the condensed reaction by-products are trapped in the trap mechanism.
Dependencies are inferred from the claim text.