Fabrication of a reflective spatial light modulator
AssigneeMiradia Inc.
InventorsShaoher X Pan, Xiao Yang, Dongmin Chen
Life of this patent
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Abstract
Fabrication of a reflective spatial light modulator including a micro-mirror array. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material by only two main etching steps. A first etch forms cavities in a first side of the material. A second etch forms support posts, a vertical hinge, and a mirror plate. Between the first and second etches, the substrate can be bonded to addressing and control circuitry.
Claims11
A method of fabricating a spatial light modulator, comprising:
- generating a mask on a first side of a first substrate;
- forming cavities in the first side of the first substrate;
- fabricating electrodes and addressing and control circuitry on a first side of a second substrate;
- and
- then bonding the first side of the first substrate to the first side of the second substrate;
- and forming hinges, connectors, and mirror plates on a second side of the first substrate after bonding the first side of the first substrate to the first side of the second substrate.
A method of fabricating a spatial light modulator including an array of a plurality of mirrors, comprising:
- generating a first mask on a first side of a substrate, the first mask defining areas to be etched from the first side of the first substrate;
- etching the areas on the first side of the first substrate defined by the first mask to form a plurality of cavities on the first side on the first substrate;
- fabricating control circuitry and then electrodes on a first side of a second substrate;
- then bonding the first side of the substrate to the first side of the second substrate;
- creating a reflective surface on the second side of the first substrate;
- generating a second mask defining areas to be etched from the second side of the first substrate;
- and
- etching the areas on the second side of the first substrate defined by the second mask to form a plurality of hinges and mirror plates.
Dependencies are inferred from the claim text.