Method and apparatus for generation of fine particles
AssigneeDenso Corporation
InventorsAtusi Sakaida, Toshihisa Taniguchi, Hiroshi Tanaka
Life of this patent
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Abstract
To supply microfine liquid droplets to a microscopic space for enabling micromachining and provide a method and an apparatus for forming the microfine liquid droplets, there is provided a method and an apparatus for generating liquid fine particles, comprising atomizing a liquid, fractionating the atomized liquid particles to form microfine liquid droplets by inertial fractionation and contacting the microfine liquid droplets with a heated carrier gas, thereby thermally drying the liquid particles to form finer particles.
Claims7
A method for generating liquid fine particles comprising atomizing a liquid to form atomized liquid particles, fractionating microfine liquid droplets from said atomized liquid particles by inertial fractionation, and contacting said microfine liquid droplets with a heated carrier gas, to thereby thermally dry said microfine liquid droplets to form liquid droplets which are finer than said microfine liquid droplets.
Dependencies are inferred from the claim text.