Substrate coating unit and substrate coating method
AssigneeTokyo Electron Limited
InventorYuji Matsuyama
Life of this patent
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Abstract
The present invention is a coating unit for coating a substrate with a coating solution, comprising a coating solution discharge member for discharging the coating solution to the substrate which is positioned in a downward part. A lower surface of the coating solution discharge member is in a shape having a length longer, at least, than the radius of the substrate and having a narrow width. A coating solution discharge port is disposed in a portion of the coating solution discharge member, facing the center of the substrate, while a solvent mist discharge port for discharging a solvent mist of the coating solution is disposed in a portion facing a peripheral portion including an outer edge potion of the substrate, when the coating solution discharge member is positioned above the radius of the substrate.
Claims7
A coating unit for coating a substrate with a coating solution, comprising:
- a coating solution discharge device configured to discharge the coating solution onto the substrate and having a length longer than a radius of the substrate, the coating solution discharge device having at least one coating solution discharge port positioned to supply the coating solution to a center portion of the substrate and a plurality of solvent mist discharge ports positioned to supply a solvent mist of the coating solution to peripheral portions of the substrate;
- a storage section configured to store the coating solution and connected to the coating solution discharge port;
- a discharge pressure adjusting chamber having a pressure and configured to discharge the coating solution onto the substrate at a predetermined pressure;
- a gas supply passage through which a gas containing the solvent mist is supplied to the plurality of solvent mist discharge ports, wherein the gas supply passage is connected to the discharge pressure adjusting chamber, and a diffuser panel is disposed in the gas supply passage so that the gas containing the solvent mist is uniformly discharged from the plurality of solvent mist discharge ports;
- and
- a pressure adjusting unit configured to adjust the pressure of the discharge pressure adjusting chamber.
Dependencies are inferred from the claim text.