Filters employing porous strongly acidic polymers
AssigneeMykrolis Corporation
InventorsOleg Kishkovich, Robert W. Rezuke, Devon Kinkead
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Abstract
A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.
Claims19
A method for forming a vapor absorptive non-woven air filter for a semiconductor processing system comprising thermo-plastic fibers and adsorptive particles, said composite having a fiber density, comprising the steps of:
- providing a non-woven carrier material having a surface and comprising thermo-plastic fibers;
- and
- applying adsorbent particles of a carboxylic acid copolymer to said surface of said carrier material to form a filter element for a semiconductor processing system.
A method of forming a filter element comprising the steps of:
- forming a layer of adsorbent powder material;
- delivering binder onto selected regions of the layer of adsorbent powder material to bond the regions of adsorbent material in accordance with a programmed model;
- and
- repeating steps (a) and (b) until a filter element matching the programmed model is formed.
Dependencies are inferred from the claim text.