Diaphragm valve with reliability enhancements for atomic layer deposition

A diaphragm valve comprising:

• a valve body defining a valve passage having an inlet and an outlet;
• a valve seat surrounding one of the inlet and the outlet, the valve seat having an annular seating surface extending radially from said one of the inlet and the outlet, and adjacent the valve passage;
• and
• a flexible diaphragms having first and second sides, the diaphragm positioned adjacent the valve passage opposite the valve seat with the first side facing toward the seating surface of the valve seat, the diaphragm operable in response to an applied actuation force to flex between an open position whereby the valve passage is at least partially open and a closed position whereby the first side of the diaphragm is pressed against the valve seat to thereby block the valve passage,
• the valve seat including a seating ridge surrounding said one of the inlet and the outlet, and extending from the seating surface toward the diaphragm.

A diaphragm valve comprising:

• a valve body defining a valve passage having an inlet and an outlet;
• a valve seat surrounding one of the inlet and the outlet, the valve seat having an annular seating surface extending radially from said one of the inlet and the outlet, and adjacent the valve passage;
• a flexible diaphragm having first and second sides, the diaphragm positioned adjacent the valve passage opposite the valve seat with the first side facing toward the seating surface of the valve seat, the diaphragm operable in response to an applied actuation force to flex between an open position whereby the valve passage is at least partially open and a closed position whereby the first side of the diaphragm is pressed against the valve seat to thereby block the valve passage;
• and
• a spacer ring interposed between the valve seat and the valve body to establish an axial position of the seating surface relative to the valve body.

A diaphragm valve comprising:

• a valve body defining a valve passage having an inlet an outlet;
• a valve seat surrounding one of the inlet and the outlet, the valve seat having an annular seating surface extending radially from said one of the inlet and the outlet, and adjacent the valve passage;
• a flexible diaphragm having first and second sides, the diaphragm positioned adjacent the valve passage opposite the valve seat with the first side facing toward the seating surface of the valve seat, the diaphragm operable in response to an applied actuation force of flex between an open position whereby the valve passage is at least partially open and a closed position whereby a substantial portion of the first side of the diaphragm is pressed against the valve seat to thereby block the valve passage and facilitate heat transfer between the valve seat and the diaphragm;
• and
• a heating body thermally contacting the valve body and extending proximal to the second side of the diaphragm thereby forming a thermally conductive pathway that facilitates maintaining an operating temperature at the diaphragm.

A diaphragm valve comprising:

• a valve body defining a valve passage having an inlet and an outlet;
• a valve seat surrounding one of the inlet and the outlet, the valve seat having an annular seating surface extending radially from said one of the inlet and the outlet, and adjacent the valve passage;
• a flexible diaphragm having first and second sides, the diaphragm positioned adjacent the valve passage opposite the valve seat with the first side facing toward the seating surface of the valve seat, the diaphragm operable in response to an applied actuation force to flex between an open position whereby the valve passage is at least partially open and a closed position whereby a substantial portion of the first side of the diaphragm is pressed against the valve seat to thereby block the valve passage and facilitate heat transfer between the valve seat and the diaphragm;
• means for actuating the diaphragm;
• and
• means for attenuating heat transfer between the valve passage and the means for actuating.

A diaphragm valve comprising:

• a valve body defining a valve passage having an inlet and an outlet;
• a valve seat surrounding one of the inlet and the outlet, the valve seat having an annular seating surface extending radially from said one of the inlet and the outlet, and adjacent the valve passage;
• a flexible diaphragm having first and second sides, the diaphragm positioned adjacent the valve passage opposite the valve seat with the first side facing toward the seating surface of the valve seat, the diaphragm operable in response to an applied actuation force to flex between an open position whereby the valve passage is at least partially open and a closed position whereby a substantial portion of the first side of the diaphragm is pressed against the valve seat to thereby block the valve passage and facilitate heat transfer between the valve seat and the diaphragm;
• and
• means for reducing a fluid pressure on the second side of the diaphragm.

A precursor material delivery system including a diaphragm valve comprising:

• a valve body defining a valve passage having an inlet and an outlet;
• a valve seat surrounding one of the inlet and the outlet, the valve seat having an annular seating surface extending radially from said one of the inlet and the outlet, and adjacent the valve passage;
• and
• a flexible diaphragm having first and second sides, the diaphragm positioned adjacent the valve passage opposite the valve seat with the first side facing toward the seating surface of the valve seat, the diaphragm operable in response to an applied actuation force to flex between an open position whereby the valve passage is at least partially open and a closed position whereby a substantial portion of the first side of the diaphragm is pressed against the valve seat to thereby block the valve passage and facilitate heat transfer between the valve seam and the diaphragm.

An ALD reactor including a diaphragm valve comprising:

• a valve body defining a valve passage having an inlet and an outlet;
• a valve seat surrounding one of the inlet and the outlet, the valve seat having an annular seating surface extending radially from said one of the inlet and the outlet, and adjacent the valve passage;
• and
• a flexible diaphragm having first and second sides, the diaphragm positioned adjacent the valve passage opposite the valve seat with the first side facing toward the seating surface of the valve seat, the diaphragm operable in response to an applied actuation force to flex between an open position whereby the valve passage is at least partially open and a closed position whereby a substantial portion of the first side of the diaphragm is pressed against the valve seat to thereby block the valve passage and facilitate heat transfer between the valve seat and the diaphragm.