Method and apparatus for providing excitation for a process controller

A method, comprising:

• processing a workpiece in a tool;
• receiving indirect data associated with a characteristic of the workpiece;
• selecting the workpiece based on the indirect data being outside a predetermined range of expected values;
• measuring the characteristic of the selected workpiece;
• updating a control model for controlling the tool using the measured characteristic;
• and
• generating a control action for determining at least one parameter of an operating recipe for the tool based on the updated control model.

A system, comprising:

• a tool for processing workpieces in accordance with a manufacturing process, the manufacturing process having an associated design window and a process window defined within the design window;
• a process controller adapted to control the tool using a control model;
• a metrology tool;
• and
• a sampling controller adapted to identify a workpiece likely to have a characteristic outside the process window, and direct the metrology tool to measure the characteristic of the identified workpiece, wherein the process controller is further adapted to update the control model using the measured characteristic.

A system, comprising:

• a tool adapted to process a workpiece;
• a process controller adapted to control the tool using a control model;
• a metrology tool;
• and
• a sampling controller adapted to receive indirect data associated with a characteristic of the workpiece, select the workpiece based on the indirect data being outside a predetermined range of expected values, and direct the metrology tool to measure the characteristic of the selected workpiece, wherein the process controller is further adapted to update the control model using the measured characteristic.

A system, comprising:

• means for processing workpieces in accordance with a manufacturing process, the manufacturing process having an associated design window and a process window defined within the design window;
• means for controlling the processing using a control model;
• means for identifying a workpiece likely to have a characteristic outside the process window;
• means for measuring the characteristic of the identified workpiece;
• means for updating the control model using the measured characteristic;
• and
• means for generating a control action for determining at least one parameter of an operating recipe for the means for processing workpieces based on the undated control model.

A system, comprising:

• means for processing a workpiece;
• means for receiving indirect data associated with a characteristic of the workpiece;
• means for selecting the workpiece based on the indirect data being outside a predetermined range of expected values;
• means for measuring the characteristic of the selected workpiece;
• means for updating a control model for controlling the means for processing the workpiece using the measured characteristic;
• and
• means for generating a control action for determining at least one parameter of an operating recipe for the means for processing a workpiece based on the updated control model.